The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 1996
Filed:
Jan. 12, 1994
Applicant:
Inventor:
Burn J Lin, Tampa, FL (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D / ; B05C / ;
U.S. Cl.
CPC ...
427240 ; 427335 ; 427377 ; 4273855 ; 427422 ; 427425 ; 118 52 ; 118 64 ; 118305 ; 118313 ; 118314 ; 118320 ;
Abstract
A minimal amount of waste in liquid resist material is achieved by dispensing through small openings at close proximity to the substrate. An airtight substrate chamber as well as airtight sealing of dispensing assembly and airtight sealing of the space that does not have to be opened for substrate loading and unloading, are used to facilitate a uniform and planarized coating after a high-speed spin off of excess resist.