The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 1996
Filed:
Jan. 26, 1996
Applicant:
Inventors:
Wilfried Von Ammon, Burghausen, DE;
Erich Dornberger, Burghausen, DE;
Herber Weidner, Haiming, DE;
Alfred Pardubitzki, Burghausen, DE;
Assignee:
Wacker Siltronic Gesellschaft fur Halbleitermaterialien AG, Burghausen, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B01D / ;
U.S. Cl.
CPC ...
7222451 ; 117217 ; 117900 ; 373158 ;
Abstract
Apparatus for producing a single crystal of semiconductor material in accance with the Czochralski method, has a cooling means which cools the growing single crystal and is constructed in two parts, The first is an upper part duct system through which a liquid coolant flows. The second is a lower part which is a heat-conducting cooling body.