The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 1996
Filed:
Jul. 01, 1994
John S Hearne, Los Altos, CA (US);
OnTrak Systems, Inc., Milpitas, CA (US);
Abstract
A wafer holder which grips a wafer by its edges is disclosed. The wafer holder is mounted on a spindle assembly which spins the wafer so held, for example, to spin dry both the front and back side of the wafer. The wafer holder includes two pairs of wafer holding bumpers, each pair coupled to one end of a reciprocating arm which swings each pair inward and outward to define an open position for releasing or loading a wafer, and a closed position for holding the wafer. Each arm is coupled to an insert and thrust bearing allowing for rotation to provide the reciprocating motion. After the insert and thrust bearing have toggled past a predefined position while the wafer holder is in the closed position, further motion is prevented, to lock the wafer holder in the closed position. Further, the insert member rotates back and forth in response to up and down movement of a rod within the spindle to allow for opening and closing of the wafer holder.