The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 1996
Filed:
Dec. 27, 1994
Applicant:
Inventors:
Nobuo Kawada, Gunma-ken, JP;
Toshihiko Shindoh, Gunma-ken, JP;
Takaaki Nagao, Gunma-ken, JP;
Kazuhiko Urano, Gunma-ken, JP;
Junichi Arami, Tokyo, JP;
Kenji Ishikawa, Kanagawa-ken, JP;
Assignees:
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Tokyo Electoron Limited, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H02N / ;
U.S. Cl.
CPC ...
361234 ;
Abstract
The ceramic electrostatic chuck with built-in heater of the present invention is disclosed having electrodes for electrostatic chuck made from an electroconductive ceramic bonded to a surface of a supporting substrate made from an electrically insulating ceramic, a heat generating layer made from an electroconductive ceramic is bonded to the other surface and the side surface and a covering layer made from an electrically insulating ceramic is provided thereon.