The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 1996
Filed:
May. 26, 1995
Applicant:
Inventors:
Andrew J Blakeney, Seekonk, MA (US);
Arturo N Medina, Pawtucket, RI (US);
Medhat A Toukhy, Barrington, RI (US);
Lawrence Ferreira, Fall River, MA (US);
Sobhy Tadros, Seekonk, MA (US);
Assignee:
OCG Microelectronic Materials, Inc., Norwalk, CT (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F / ; G03F / ;
U.S. Cl.
CPC ...
430326 ; 430165 ; 430191 ; 430192 ; 430193 ; 430330 ;
Abstract
A photosensitive compound comprising at least one o-quinonediazide sulfonic acid ester of a phenolic compound, said esters selected from the group consisting of formulae (IB) and (IIB): ##STR1## wherein the photosensitive compound is used in a radiation sensitive composition and a process for forming a positive patterned image.