The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 06, 1996

Filed:

Jul. 08, 1994
Applicant:
Inventors:

Yoneta Tanaka, Kanagawa, JP;

Shoichi Okada, Kawasaki, JP;

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B / ; G03B / ; G03B / ;
U.S. Cl.
CPC ...
355 53 ; 355 54 ; 355 86 ; 355 95 ;
Abstract

A process and device for adjusting distance for purposes of parallel positioning of a workpiece relative to a mask at a preset distance in which production can be done easily and with low costs. A workpiece is held at a distance from a mask on a work-holding fixture and one of the work-holding fixture and a mask carrier carrying the mask is moved by a moving device toward the other to bring the workpiece comes into contact with the mask. After such contact has occurred, movement of the moving device is continued until a signal is transmitted to a system controller from each of at least three alignment devices which are arranged on the work-holding fixture or the mask carrier, the alignment devices having calibration device which essentially begin to move beginning at a time at which the workpiece and mask come into contact with one another and can no longer execute any further relative movement. Movement of the work-holding fixture or the mask carrier is stopped when the system controller receives a signal from all of the calibration devices, which thus is assessed as achievement of a parallel alignment of the workpiece and mask relative to one another, at which time the displacement of the calibration device of each alignment device is fixed. Thereafter, the direction of movement of the one of the work-holding fixture and the mask carrier is reversed until the desired spacing distance is achieved.


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