The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 1996
Filed:
Sep. 19, 1994
Applicant:
Inventors:
Gerhard Benz, Boeblingen, DE;
Jiri Marek, Reutlingen, DE;
Martin Willmann, Reutlingen, DE;
Frank Bantien, Ditzingen, DE;
Horst Muenzel, Reutlingen, DE;
Franz Laermer, Stuttgart, DE;
Michael Offenberg, Tuebingen, DE;
Andrea Schilp, Schwaebisch Gm und, DE;
Assignee:
Robert Bosch GmbH, Stuttgart, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
216-2 ; 216 99 ; 437228 ; 437234 ; 205656 ; 205661 ;
Abstract
A method for manufacturing micro-mechanical components in which a structure is produced on a silicon layer, which is to be undercut in a further step. The silicon is selectively anodized for this undercutting operation. Thus, the method enables the manufacturing of micro-mechanical components that can be integrated together with bipolar circuit elements.