The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 23, 1996
Filed:
Jun. 30, 1995
Alan Berezin, Austin, TX (US);
Reuben Quintanilla, Austin, TX (US);
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Abstract
Method and a system for performing semiconductor manufacturing defect analysis in cooperation with wafer scanning tools. The system analyzes data associated with defects on a substrate. First, a subset of defects is selected from subpopulations of the defects according to preclassify rules, such that classification codes indicative of defect type may then be assigned to the selected defects based upon review thereof. Classification codes indicative of defect type are then randomly assigned to a number of unselected ones of the defects in each of the subpopulations, the number, for each defect type, being weighted according to the expected occurence of the defect type extrapolated from the selected defects of the same defect type.