The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 16, 1996
Filed:
Jun. 02, 1995
Applicant:
Inventors:
Thomas E Dinan, Poughkeepsie, NY (US);
Kirk G Berridge, Fishkill, NY (US);
Madhav Datta, Yorktown Heights, NY (US);
Thomas S Kanarsky, Hopewell Junction, NY (US);
Michael B Pike, Hopewell Junction, NY (US);
Ravindra V Shenoy, Peekskill, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25F / ; C25F / ;
U.S. Cl.
CPC ...
205670 ; 205672 ; 205686 ; 2042 / ;
Abstract
A nozzle is provided for use in electroetching a vertically oriented workpiece, comprising a housing having a top, sides, and bottom for creating a flow of etching solution on the workpiece, and means for shaping the flow of etching solution into a moving channel to improve etch uniformity of the workpiece.