The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 1996
Filed:
Mar. 02, 1994
Applicant:
Inventor:
Eiji Osanai, Yokohama, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; B23Q / ;
U.S. Cl.
CPC ...
7449007 ; 108 20 ; 108141 ; 384113 ; 384279 ; 384902 ; 7449008 ;
Abstract
A base board supported on an X-Y stage or the like of an exposure apparatus includes a cylindrical fixed member. Porous pads held on the fixed member support the inner circumferential surface of a guide member provided as one body with a holding member for holding a wafer in a non-contact state. The base board is rotated around its central axis by a .theta. linear motor, and is reciprocated in the vertical direction by Z linear motors provided at an equal interval in the circumferential direction. Each of the Z linear motors and the .theta. linear motor includes a rotor fixed to the holding board, and a stator that includes a coil fixed to the base board.