The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 30, 1996

Filed:

Nov. 30, 1994
Applicant:
Inventors:

Harrison B Haver, Scottsdale, AZ (US);

Mark D Griswold, Chandler, AZ (US);

Assignee:

Motorola, Inc., Schaumburg, IL (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
257758 ; 257760 ; 257587 ; 257639 ; 257640 ; 257649 ; 257588 ;
Abstract

A semiconductor device (8) has an insulating layer (16) overlying a semiconductor substrate (12). The insulating layer has a first opening that defines an aperture (18) extending from the insulating layer to the semiconductor substrate, and at least a first portion of a first conductive terminal (42) is disposed in the aperture. A second conductive terminal (52) has a second portion (28) disposed in the aperture. The second portion of the second conductive terminal is separated from the first conductive terminal by a composite dielectric layer including a nitride layer (32) and an oxide layer (30). In one approach, the oxide layer is formed by the oxidation of the second portion of the second conductive terminal.


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