The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 16, 1996
Filed:
Jun. 28, 1994
Applicant:
Inventor:
Osamu Monoe, Sagamihara, JP;
Assignees:
Tokyo Electron Kabushiki Kaisha, Tokyo, JP;
Tokyo Electron Tohoku Kabushiki, Kaisha, Iwate, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F27D / ;
U.S. Cl.
CPC ...
432 77 ; 432 83 ; 432 84 ; 432123 ; 432152 ; 432239 ;
Abstract
Nozzles that blow an air are disposed in a space between an outer wall of a process tube and a heat generating resistor. The openings of the nozzles are oriented to the process tube corresponding to an arrangement area of semiconductor wafers. An air blowing angle and alignment of the openings of the nozzles are designated corresponding to the length of the arrangement area of the semiconductor wafers. Thus, since a portion where natural heat radiation is weak is forcedly cooled, the cooling effect can become equal in the entire region of the process tube, thereby reducing temperature drop time.