The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 09, 1996
Filed:
Feb. 24, 1995
Applicant:
Inventors:
Koji Kishimoto, Tokyo, JP;
Tetsuya Homma, Tokyo, JP;
Assignee:
NEC Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437195 ; 437231 ; 437228 ; 437982 ;
Abstract
After forming lower level wiring and plasma oxide layer, SOG film is applied by applying a solution containing hydrogen silsesquioxane as primary component under rotation. Pre-baking of the SOG film is performed by a first heat treatment and causes reflow thereof by a second heat treatment at a temperature higher than the first heat treatment. Subsequently, another plasma oxide layer is formed. By this, in an interlayer insulation layer including SOG film, occurrence of crack and so forth can be prevented and water resistance can be improved.