The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 19, 1996
Filed:
May. 19, 1994
Erwin Spanner, Traunstein, DE;
Dr. Johannes Heidenhain GmbH, Traunreut, DE;
Abstract
An integrated optical interferometer is provided having a substrate located on one object and a measuring reflector or measuring diffraction grating located on another object. A beam impinging upon the substrate is split into two partial beams by a coupling grating and is coupled into a beam waveguide and supplied to another coupling grating. A second partial beam is routed by the measuring reflector to the second coupling grating and there interferes with the first partial beam. The second coupling grating is divided into a plurality of gratings which are phase-shifted with respect to each other so that signals that are phase-shifted with respect to each other can be generated by a plurality of detectors.