The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 16, 1996
Filed:
Sep. 08, 1993
Robert D Larrabee, Derwood, MD (US);
Jay F Marchiando, Germantown, MD (US);
The United States of America as represented by the Secretary of Commerce, Washington, DC (US);
Abstract
A method of measuring the linewidth of an electrical conductor on a semiconductor substrate includes preparing mutually separated test and interconnection areas on a surface of a semiconductor substrate; forming an electrical interconnection conductor on the surface of the substrate in the interconnection area with a substantially uniform linewidth electrically interconnecting elements on the surface; simultaneously with forming the interconnection conductor, forming in the test area a test structure having a plurality of closed loops of the electrical conductor having the same linewidth as the interconnection conductor; measuring the impedance or complex reflection coefficient of the test structure using a head disposed opposite the test area, spaced from the surface, and coupled to the test structure without directly contacting the test structure; and correlating the measured impedance or complex reflection coefficient of the test structure with measurements of geometrically identical structures of conductors having known linewidths to determine the linewidth of the test structure and, thereby, the linewidth of the interconnection conductor.