The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 1995
Filed:
Aug. 23, 1994
Applicant:
Inventor:
Yuuichi Abe, Tokyo, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F25b / ; G01R / ;
U.S. Cl.
CPC ...
324754 ; 432241 ; 165 804 ; 62126 ; 414222 ;
Abstract
A probe apparatus comprises a housing, a probing mechanism arranged in the housing and including a supporting table for supporting an object having electrodes and movably arranged to locate the object at a measurement position, and probes which is brought into contact with the respective electrodes of the object supported by the supporting table, a load/unload mechanism arranged in the housing, for loading/unloading the object in/from the supporting table, and a downflow forming unit for forming a downflow of clean air flowing from an upper position to a lower position of the housing in every region inside the housing.