The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 07, 1995
Filed:
May. 03, 1993
Applicant:
Inventors:
Andreas Wolf, Burgkirchen, DE;
Franz Koeppl, Erlbach, DE;
Assignee:
Wacker-Chemitronic Gesellschaft fur Elektronik-Grundstoffe mbH, Burghausen, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B02C / ;
U.S. Cl.
CPC ...
241-1 ; 241 24 ;
Abstract
Bodies of hyperpure semiconductor material can be reduced in size without ntamination by being subjected to shock waves. The method is preferably carried out at room temperature, so that diffusion into the interior of the semiconductor, which is induced and/or accelerated by high temperatures, is largely avoided for superficially adsorbed foreign particles. The shock waves are generated in a focal point of a semiellipsoidal reflector by electrical discharge between two electrodes.