The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 31, 1995
Filed:
Jun. 23, 1994
Applicant:
Inventors:
Luke D Hinkle, Townsend, MA (US);
James Provost, Derry, NH (US);
Assignee:
MKS Instruments, Inc., Andover, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01F / ;
U.S. Cl.
CPC ...
7320425 ; 7320415 ;
Abstract
The disclosed mass flow transducer is of the type including a balanced bridge comprising two, substantially identical, thermal elements forming two sides of the bridge between the top and the bottom of the bridge, the two elements being adapted to be positioned in two regions of a laminar flow tube in a symmetrical tandem arrangement so as to sense flow through the tube, one element being upstream from the other. The preferred transducer includes control means for monitoring the voltage at the top and bottom of the bridge and monitoring the current required to maintain the node between the thermal elements at virtual ground.