The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 1995
Filed:
Feb. 18, 1994
Kamalesh Desai, Hopewell Junction, NY (US);
Michael E Scaman, Peekskill, NY (US);
James P Wood, Beacon, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
Defects and latent defects are detected in connection patterns on a substrate by automated optical testing using bright field illumination and feature extraction template yielding an improved degree of feature discrimination. The feature extraction templates include angularly disposed vectors requiring detection of a predetermined (e.g. foreground) image value with a predetermined distance and a vector angularly interposed between those vectors which requires no detection of the predetermined image value within a distance which is greater than the predetermined distance. Thus, for successful detection of a defect, a portion of one of a set of templates having such a vector condition configuration must be wedged between areas of an image of a surface having the predetermined image values. This technique is implemented on commercially available automated optical inspection tools and results in avoidance of false detections even in the presence of a high density of image artifacts caused by the topologically sensitive bright field illumination employed.