The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 1995
Filed:
Apr. 04, 1994
Alain Y Charpentier, Nantes, FR;
Matra MHS, Nantes, FR;
Abstract
A method for monitoring the boron content of the borophosphosilicate, BPSG. The BPSG is obtained by the oxidation of silane, of diborane and of phosphine in a reactor, starting with a first, diborane/silane gas mixture and a second, phosphine/silane gas mixture by monitoring the ratio .rho.=diborane/(diborane+silane) of the mixture resulting from the mixing of the first and second gas mixtures. Monitoring of the boron content is obtained by measuring the density of the first mixture, determining the amount of residual hydrogen in the first mixture and modulating the mass flow rate of the first mixture in response to the calculated ratio .rho..
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