The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 1995
Filed:
Jul. 22, 1994
Applicant:
Inventor:
Masato Hamatani, Tokyo, JP;
Assignee:
Nikon Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S / ;
U.S. Cl.
CPC ...
372101 ; 372 57 ; 372 60 ; 359509 ; 359809 ;
Abstract
A laser optical apparatus permits the use of a laser beam having a spectrum characteristic which substantially overlaps with an absorption band of oxygen, with a simple construction. Oxygen in a lens barrel of an optical system or a sealed space between lens barrels is absorbed by a deoxidation agent. Accordingly, even if a laser beam by an excimer laser using argon fluoride having a spectrum characteristic which substantially overlaps with the absorption of oxygen is passed through the optical system, the loss of laser energy by the absorption of oxygen, the generation of noxious gas and the swing due to the change of transmission are prevented.