The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 06, 1995
Filed:
Feb. 24, 1994
Lawrence C Lei, Milpitas, CA (US);
Gean Hsu, Fremont, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A pneumatic air cylinder having a normally open solenoid valve provides emergency recovery power to a wafer heater assembly during interruption of an electric power supply. The wafer heater assembly includes a well formed in an upper surface that is adapted to receive and align a wafer during wafer processing. During normal operating conditions, the air cylinder is out of the way of the motion of an electric motor that drives the wafer heater assembly. In the event that the electric power is interrupted, the normally open valve is opened, allowing air to operate the cylinder, drive the heater assembly down, and move the wafer out of the heater well before the heater assembly cools sufficiently to contract and break the wafer. When electric power is resumed, the air supply to the air cylinder is shut off, and the heater is rehomed by the electric motor. Such procedure unlatches a system command to allow the electric motor to position the pneumatic cylinder for future operation.