The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 23, 1995
Filed:
Nov. 09, 1993
Applicant:
Inventors:
Kuo-Hua Lee, Wescosville, PA (US);
Chen-Hua D Yu, Allentown, PA (US);
Assignee:
AT&T Corp., Murray Hill, NJ (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437 12 ; 437228 ; 437190 ; 437941 ;
Abstract
A method of fabricating integrated circuits is disclosed. A layer of doped silicon dioxide is deposited over a partially fabricated integrated circuit. The doped silicon dioxide is heated to permit it to attract sodium ions. After the doped silicon dioxide has been heated, it is removed by an etching process which exhibits great selectivity to the remaining underlying portion of the integrated circuit.