The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 02, 1995

Filed:

Jun. 06, 1994
Applicant:
Inventors:

Hyong Y Lee, Fairborn, OH (US);

Belinda Johnson, Dayton, OH (US);

Rocky Reston, Beavercreek, OH (US);

Chris Ito, Colorado Springs, CO (US);

Gerald Trombley, Centerville, OH (US);

Charles Havasy, Beavercreek, OH (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437 40 ; 437133 ; 437177 ; 437203 ;
Abstract

The incorporation of an aluminum arsenide (AlAs) buffer layer in a gallium arsenide (GaAs) field effect transistor (FET) structure is found to improve the overall device performance, particularly in the high temperature operating regime. Similar characteristics may be obtained from devices fabricated with an Al.sub.x Ga.sub.1-x As (0.2.ltoreq.x.ltoreq.1) barrier layer. At temperatures greater than 250.degree. C., the semi-insulating gallium arsenide substrate begins to conduct significant amounts of current. The highly resistive AlAs buffer layer limits this increased conduction, thus permitting device operation at temperatures where parasitic leakage currents would impede or prevent device operation. Devices fabricated with AlAs buffer layers exhibited lower drain parasitic leakage currents and showed improved output conductance characteristics at 350.degree. C. ambient temperature. The buffer layer will also improve the backgating problems which are detrimental to the operation of monolithic GaAs digital circuits having closely spaced devices under different bias conditions. An additional benefit of the high temperature capabilities of these devices is an improved reliability at conventional operating temperatures. Devices fabricated with this technology have shown an order of magnitude improvement in switching characteristics.


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