The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 1995
Filed:
Sep. 10, 1993
Oliver C Wells, Yorktown Heights, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A detector system for a low-loss electron operated scanning electron microscope providing a focused primary electron beam and producing backscattered electrons having a plurality of energy levels by interactions with a specimen disposed within the primary electron beam includes a plurality of grids, each of the grids having a corresponding predetermined potential, wherein the grids selectively filter the backscattered electrons to permit collection of low loss electrons having at least a predetermined threshold energy level at an exit side of the grids, a focusing grid disposed opposing the exit side of the grids for focusing the low loss electrons to produce convergence of the low loss electrons in a convergence region and an electron detector located substantially within the convergence region for detecting the low loss electrons. Both the electron detector and the focusing grids are maintained at predetermined detector and focusing potentials, which can be made equal to one another. A method for producing a detector system for a SEM is also disclosed.