The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 1995
Filed:
Aug. 13, 1993
Hiroyoshi Yamamoto, Tokyo, JP;
Seiko Instruments, Inc., , JP;
Abstract
In an atomic force microscope capable of permitting the non-destructive testing of a large sample, a fine motion element is provided for three-dimensional scanning of the sample in order to determine the surface topography thereof. The fine motion element has attached thereto one end of a small spring element, and a detecting tip is connected to the opposite end of the spring element for positioning the end portion of the spring element proximate the sample surface. A displacement detector detects displacement of the spring element by detecting laser light obtained by irradiating a laser beam on the rear surface of the spring element and detecting the displacement using a multi-segment photodetector. Since the fine motion element does not support the sample, the three-dimensional relative scanning of the sample surface by the detecting tip is possible even for large-sized samples.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile