The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 1995
Filed:
Nov. 12, 1992
David R Rhiger, Santa Barbara, CA (US);
Gerald A Garwood, Jr, Santa Barbara, CA (US);
Santa Barbara Research Center, Goleta, CA (US);
Abstract
An ellipsometry cell is provided with a transparent lid that is positioned close to a specimen within the cell, thus allowing for a low volume wet chemical treatment of the specimen, and yet prevents interference with the ellipsometry measurements by partial reflections of a probe beam off the outer and inner lid surfaces. This is accomplished by configuring the lid to direct an ellipsometry beam and reflections thereof at different angles, so that the beam but not its reflections enter an ellipsometer analyzer. The lid preferably has an angled outer surface with beam entry and exit windows symmetrically tapering from a central ridge, and its inner surface substantially flat and parallel to the cell base.