The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 14, 1995
Filed:
Feb. 19, 1993
Applicant:
Inventors:
Katsuhide Watanabe, Fujisawa, JP;
Yoichi Kanemitsu, Chigasaki, JP;
Hiroyuki Shinozaki, Fujisawa, JP;
Naoji Hiraki, Iizuka, JP;
Shinichi Moriyama, Iizuka, JP;
Assignee:
Ebara Corporation, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
B25J / ;
U.S. Cl.
CPC ...
4147446 ; 414751 ; 901 17 ; 901 23 ; 310 905 ;
Abstract
A robot with no mechanically contacting components are suitable for use in special environments such as semiconductor manufacturing processes where dust and lubrication are matters of important concern. The robot has a linear actuator composed of magnetic bearings and a linear motor for moving a robot arm linearly without mechanical contact, and a rotary actuator composed of magnetic bearings and a rotary motor for rotating a body which supports the linear actuator, around the rotary actuator without mechanical contact.