The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 1995
Filed:
Dec. 21, 1993
Sharp Kabushiki Kaisha, Osaka, JP;
Abstract
A method of forming semiconductor devices comprising the steps of forming, by restriction in the increased number of steps by a process close to the normal process, a field effect transistor having a local shallow source/drain diffusion layer on both the sides of a gate electrode for self-matching operation and without etching damages, wherein impurities are ion-implanted onto the semiconductor side wall and onto the substrate surface of both the sides, and thermal treatment operation is effected so as to form the local shallow source/drain diffusing layers by the diffusion for activating the impurities of the deep shallow source drain diffusing layers, thereby to render to be capable of restraining a short channel effect and reducing the parasitic resistance of the semiconductor devices.