The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 1995
Filed:
May. 18, 1992
ORC Manufacturing Co., Ltd., Tokyo, JP;
Abstract
A work locating method for an automatic exposing apparatus is provided. In addition to a step of delivering a work Wa from a feed-in section onto an alignment table 13a on an alignment stand in a locating section which is provided separately from an exposing section, and subjecting the work Wa to an automatic alignment operation and a step of fixing the alignment table 13a mounting the work Wa thereon to a traverser 1 which is fixed with a photomask 8 and is displaced from the exposing section 30 to the locating section 40 by vacuum suction and checking the automatic alignment thereof, the work locating method further includes a step of displacing a forklifter 22 disposed in the exposing section to the locating section 40 to deliver an alignment table 13b mounted thereon onto an alignment stand 16 during an exposure process and allowing the forklifter to return to an original position in the exposing section 30 before the exposure process is completed, thereby performing the work locating operation with high alignment accuracy between the work and the photomask and high producibility in the automatic exposure process.