The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 1995
Filed:
Nov. 19, 1991
Masaki Inaba, Kawasaki, JP;
Hiroshi Kohno, Yokohama, JP;
Fumio Ichikawa, Kamakura, JP;
Kazuaki Masuda, Kawasaki, JP;
Takashi Watanabe, Yokohama, JP;
Tsuyoshi Orikasa, Kasukabe, JP;
Masayuki Nishiwaki, Kawasaki, JP;
Toshio Tsuda, Yokohama, JP;
Akira Goto, Yokohama, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
In a laser process apparatus, a plurality of holes each having a predetermined shape are formed in a work upon radiation of light from an excimer laser. The apparatus is provided with a mask, in which a plurality of predetermined small holes are formed in correspondence with the plurality of holes to be formed in the work, and which allows laser light from the excimer laser to pass through the small holes thereof toward the work, a projection optical system for projecting optical images each having a predetermined shape onto the work through the small holes of the mask, a measurement optical system for measuring a work position, and a moving stage for moving the work on the basis of a measurement result form the measurement optical system.