The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 1995
Filed:
Jun. 18, 1993
Futoshi Ishida, Sakai, JP;
Kiyofumi Hashimoto, Suita, JP;
Toshihide Dohi, Minoo, JP;
Takao Kobayashi, Takatsuki, JP;
Yutaka Tokuyama, Osaka, JP;
Minolta Co., Ltd., Osaka, JP;
Abstract
An interferometer utilizing interference whose object is the measurement of the configuration of a test surface with high precision by allowing accurate positioning to a predetermined measuring position for the measurement of the configuration of the test surface. The interferometer is equipped with an alignment pattern (4A) which generates a wave front that converges at the predetermined measuring position, as well as a wave front for measuring the configuration corresponding to the design configuration of the test surface (9), and by using a test surface-reflected beam of the wave front generated by the alignment pattern, an alignment observation optical system (8) measures the displacement of the test surface from the predetermined measuring position.