The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 1995
Filed:
Feb. 16, 1994
Applicant:
Inventors:
Akitoshi Toda, Tokyo, JP;
Michio Takayama, Nagano, JP;
Katsuhiro Matsuyama, Tokyo, JP;
Nobuaki Sakai, Tokyo, JP;
Yasushi Nakamura, Yamanashi, JP;
Assignee:
Olympus Optical Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ; G01B / ;
U.S. Cl.
CPC ...
73105 ; 250306 ; 250307 ;
Abstract
An integrated AFM sensor includes a cantilever which has two beams extending from a support portion. The beams are integrated with each other at their ends to form a triangular free end, and a probe having a sharp distal end is arranged at the free end. The cantilever is formed by stacking a passivation layer, a piezoresistive layer, and a silicon layer. Electrodes electrically connected to the piezoresistive layer are formed at the fixed end of the cantilever through contact holes.