The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 1995
Filed:
Mar. 29, 1993
Applicant:
Inventors:
Yutaka Kitagawara, Gunma, JP;
Hiroshi Kubota, Gunma, JP;
Masaro Tamatsuka, Gunma, JP;
Takao Takenaka, Gunma, JP;
Kazuhisa Takamizawa, Fukushima, JP;
Assignee:
Shin-Etsu Handotai Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
2503381 ; 250340 ;
Abstract
A method and apparatus disclosed by this invention allows determination of the interstitial oxygen concentration in a silicon single crystal to be effected stably and accurately without being appreciably affected by change of the temperature of a sample under test. The interstitial oxygen concentration in the silicon single crystal is determined on the basis of the value of:
Kitagawara, Yutaka. (1995). Method and apparatus for determination of interstitial oxygen (U.S. Patent No. 5386118). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5386118
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile