The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 17, 1995
Filed:
May. 21, 1993
Hirotami Koike, Tokyo, JP;
Kabushiki Kaisha Topcon, Tokyo, JP;
Abstract
The present invention aims at providing an apparatus for morphological observation of a sample or easily identifying a luminous part of a sample. This morphological observation apparatus comprises an illumination system 3 for bombarding charged particles to a sample, a photon detector system for receiving light generated from a luminous part of the sample due to illumination of the charged particles, a photomultiplier tube 7 for detecting electrons coming from various parts of the sample upon illumination of the charged particles in such various ways as to correspond to a surface structure of the sample, and a signal processing unit for superimposing morphological signal, in which a morphological image of the sample 5 and an image of the luminous part are superimposed one upon the other, in accordance with a signal of the photon detector system 9 and a detection signal of a photomultiplier tube 7, and a television monitor 19 for displaying the luminous part of the sample 5 and the morphological image in a superimposed condition relative to each other in accordance with the superimposed signal.