The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 1995
Filed:
Feb. 18, 1994
Applicant:
Inventors:
Jing S Shu, Austin, TX (US);
Chien S Liang, Plano, TX (US);
Grover W Trytten, Plano, TX (US);
Yvonne D Satterfield, Dallas, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05D / ;
U.S. Cl.
CPC ...
427240 ; 427314 ; 427316 ; 427508 ;
Abstract
An antistatic solution is disclosed to aid in the measurement of patterned resists by scanning electronic microscopes. The solution comprises a quaternary ammonium salt and a suitable solvent. The anion of the salt is selected from the group consisting of saccharinate, nitrate, sulfates, alkyl sulfates and alkoxylate. The four groups of the cation are selected from the group consisting of alkyl and alkyl derivatives.