The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 1994
Filed:
Aug. 27, 1992
Applicant:
Inventors:
Karen A Graziano, Warrington, PA (US);
Leonard E Bogan, Jr, Harleysville, PA (US);
Robert J Olsen, Lansdale, PA (US);
Susan E Anderson, Lansdale, PA (US);
Assignee:
Rohm and Haas Company, Philadelphia, PA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F / ; G03F / ;
U.S. Cl.
CPC ...
430270 ; 430168 ; 430169 ; 430191 ; 430192 ; 430325 ; 430330 ; 430905 ;
Abstract
Photoresists are disclosed that display increased sensitivity, measured as lithographic potential, when compared to known photoresists that contain melamine resin as a crosslinker. The melamine resin in these photoresists contains a higher percent by weight of monomeric hexamethoxymethylmelamine than in known resists.