The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 1994
Filed:
Aug. 28, 1991
Applicant:
Inventor:
James H Ewing, Lexington, MA (US);
Assignee:
MKS Instruments, Inc., Andover, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F22B / ; H05B / ; F24H / ;
U.S. Cl.
CPC ...
392399 ; 122 40 ; 122 41 ; 392485 ;
Abstract
An improved vaporization system includes an automated valve and positive displacement pumping system using a pair of pumps operating in opposition to one another to provide continuous and constant volumetric flow at a constant predetermined pressure to an improved vaporizer using a stack of heated disks to flash vaporize the liquid. The valves are improved by providing one way flow.