The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 1994
Filed:
Apr. 23, 1993
Nikon Corporation, Tokyo, JP;
Abstract
A contour measuring apparatus comprises a laser measurement unit, a mount table for mounting an object, a motor for rotating the mount table around an axis, an altering jig for supporting the mount table and the motor and altering a direction of the axis with respect to the laser measurement unit, and a drive table for supporting the altering jig and driving the altering jig to alter a position of the mount table with respect to the laser measurement unit. A method for measuring contour comprises the steps of measuring a top plane contour of the object by the above contour measuring apparatus to obtain top plane contour data relating to a top plane measurement coordinate system, measuring a side plane contour of the object by the contour measuring apparatus to obtain side plane contour data relating to a side plane measurement coordinate system, and making the top plane and side plane measurement coordinate systems coincident to obtain overall contour data of the object in accordance with the top plane contour data and the side plane contour data.