The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 1994
Filed:
Jan. 21, 1993
Hitoshi Kawano, Ise, JP;
Atsushi Okuno, Ise, JP;
Masanori Tsuda, Ise, JP;
Mitsuhiro Hayashi, Ise, JP;
Teppei Yamashita, Ise, JP;
Masanao Murata, Ise, JP;
Tsuyoshi Tanaka, Ise, JP;
Teruya Morita, Ise, JP;
Akio Nakamura, Ise, JP;
Shinko Electric Co., Ltd., Tokyo, JP;
Abstract
An article storage house in a clean room for airtightly accommodating a wafer cassette, etc. in which the wafer cassette carried in from the outside of an article carry-in/out portion is accommodated into a container by an automatic article delivery unit disposed in the article carry-in/out portion or it is carried in the article storage house while it is accommodated in the container and is stored in sections of the article storage house. An inert gas purge mechanism and an automatic container cleaning portion are disposed in the automatic article delivery unit or each section.