The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 08, 1994
Filed:
May. 25, 1993
Applicant:
Inventors:
Roger Sinta, Woburn, MA (US);
Richard C Hemond, Brighton, MA (US);
David R Medeiros, Cambridge, MA (US);
Martha M Rajaratnam, Dedham, MA (US);
James W Thackeray, Braintree, MA (US);
Dianne Canistro, Lancaster, MA (US);
Assignee:
Shipley Company Inc., Marlborough, MA (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03C / ; G03C / ;
U.S. Cl.
CPC ...
430192 ; 430193 ; 430313 ; 430905 ; 430909 ;
Abstract
The invention provides a radiation sensitive composition having a polymer binder of phenolic and cyclic alcohol units. At least a portion of the phenolic units and/or cyclic alcohol units of the polymer are bonded to acid labile groups. High solubility differentials between exposed and unexposed regions are realized with only moderate substitution of the binder with the acid labile groups.