The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 1994
Filed:
Aug. 31, 1992
Thomas J Aton, Dallas, TX (US);
Phillip Chapados, Jr, Plano, TX (US);
Jimmy W Hosch, Dallas, TX (US);
Ajit P Paranjpe, Dallas, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
A method and apparatus for measuring submicron linewidths, using diffraction gratings. A set of 'fixed-linewidth variable-pitchwidth' test gratings has a number of gratings, each grating having the same linewidth but having different pitchwidths. These gratings are illuminated to form diffraction patterns. A set of peak intensities of the first or second order diffraction image from each grating is recorded. Either of these intensity values forms a curve around an extrema, which represents the intensity from a grating whose pitchwidth is equal to one-half the linewidth.