The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 1994
Filed:
Dec. 24, 1991
Applicant:
Inventors:
Assignee:
Nippon Steel Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F / ;
U.S. Cl.
CPC ...
430-5 ; 430321 ; 430325 ;
Abstract
The edge of a 180.degree. phase shifter on a glass substrate of a reticle has a tapered structure, and a reduction of the intensity of transmitted light by an interference in the boundary area between the phase shifter and the glass substrate is moderated.
Inoue, Hiroyuki. (1994). Reticle comprising phase shifter with a tapered edge (U.S. Patent No. 5356738). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5356738
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile