The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 1994
Filed:
Jun. 15, 1993
Applicant:
Inventor:
Gabriel G Barna, Richardson, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
250372 ; 156627 ; 20419213 ; 20419233 ; 20429803 ; 20429832 ;
Abstract
A method for testing for gas leaks in plasma reactors and gas lines introducing gas into the reactor, includes: measuring the intensity of the plasma reactor light emission; introducing known increments of a test gas into the reactor; measuring the intensity of the plasma reactor light emission after each introduction of an increment of test gas into the reactor; producing a curve resulting from the intensity readings vs increments of introduced gas; and performing a regression analysis on the curve to determine a value of gas at which the intensity is equal to zero, which value of gas is the amount of gas that has been leaked into the reactor.