The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 1994
Filed:
Jul. 01, 1993
Wonder D Wang, Taipei, TW;
Taiwan Semiconductor Manufacturing Company, Hsinchu, TW;
Abstract
A semiconductor test fixture is described for sampling thin films on the surface of a semiconductor wafer in the process of manufacturing integrated circuits thereon. A first plate is provided for supporting the wafer. At least one test fluid reservoir, and usually three reservoirs having a projecting collar or flange around one end thereof an an O-ring under the collar. A second late having at least one opening therein for allowing the major portion of the at least one test fluid reservoir to pass through and with the collar of the reservoir supporting the second plate. A hand screw is associated with the first and second plates for tightening second plate against the collar of the reservoir and, in turn the O-ring of the collar against the wafer which is supported upon the first plate so as to allow a fluid to be contained in the reservoir without leakage.