The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 1994
Filed:
Sep. 08, 1992
Applicant:
Inventors:
Katsuhiro Matsuyama, Tokyo, JP;
Akitoshi Toda, Tokyo, JP;
Assignee:
Olympus Optical Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
73105 ;
Abstract
A cantilever chip has a hold substrate and a film member bonded to the substrate. The film member has a rectangular cantilever portion and a triangular cantilever portion having an inner portion removed. These portions are formed by patterning. Each of the portions has an end fixed to the hold substrate, and a free end provided with a probe. The film member has an alignment end used as a mark to determine the position of the side end face of the hold substrate at the time of the film being bonded to the substrate. The alignment end is divided by notches into the cantilever portions.