The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 1994
Filed:
Jul. 06, 1992
Applicant:
Inventor:
Arie Shahar, Moshav Magshimim, IL;
Assignee:
Opal Technologies Ltd., Nes Ziona, IL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B / ; G01B / ; G01C / ; G01C / ;
U.S. Cl.
CPC ...
356375 ; 356371 ; 356373 ; 356376 ; 356399 ; 356400 ; 356-1 ; 356-4 ; 2502013 ; 2502015 ; 250561 ;
Abstract
A method and apparatus for detecting deviation of an examined surface from a reference plane, by: generating first and second beams of radiation, directing the first beam along a first fixed path and focussing it at a first spot on the examined surface, directing the second beam along a second fixed path intersecting the first path at a point in the reference plane and focussing the second beam to a second spot on the examined surface, and detecting the deviation of the centers of the first and second spots with respect to the intersection point in the reference plane to provide an indication of the deviation of the examined surface from the reference plane.