The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 1994
Filed:
Feb. 19, 1991
Applicant:
Inventors:
Charles R Younger, Anaheim Hills, CA (US);
Shawn L Johnston, Moorpark, CA (US);
Stuart J Irvine, Moorpark, CA (US);
Edward R Gertner, Moorpark, CA (US);
Kenneth L Hess, Yorba Linda, CA (US);
Assignee:
Rockwell International Corporation, Seal Beach, CA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437 81 ; 437168 ; 437965 ; 437971 ; 148D / ; 156606 ; 156613 ; 156614 ;
Abstract
Method and apparatus for vapor phase free methyl radical transport of indium dopant species for precise predetermined reproducible doping concentrations to control electrical properties for MOCVD grown materials.