The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 1994
Filed:
Feb. 09, 1993
Applicant:
Inventor:
Karel D Van der Mast, Eindhoven, NL;
Assignee:
U.S. Philips Corporation, New York, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250305 ; 250307 ; 250311 ;
Abstract
A method and apparatus for selecting the spatial energy spread of an electron beam for producing an image of an object, as in an electron microscope. An energy-dispersive member is arranged in the vicinity of the electron beam source to widen the electron beam in a dispersion direction. Selection of an energy dispersion within the beam is achieved by selecting a number of pixels having such a local energy dispersion in the image plane of the object.