The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 1994
Filed:
Feb. 26, 1992
Kazuo Moriya, Ageo, JP;
Takayuki Tsuzura, Ageo, JP;
Mitsui Mining & Smelting Co., Ltd., Tokyo, JP;
Abstract
An apparatus for inspecting the surface of a sheet-like object has a movable stage with an object mounted thereon; a source for lighting the object on the stage, particularly by making a plurality of illumination lights respectively having different wavelengths incident on the surface of the object from respective predetermined directions; image pickup device for fetching the image of the object under illumination of the light as image data or the images of parts of the object as image data obtained on the respective different wavelengths; image data processing device for inspecting the image data for defects; and a device for synchronizing control either for flashing the light at a predetermined time interval just after the stage commences its movement, synchronously with fetching the image data or for flashing the light and simultaneously fetching the image data obtained on the respective different wavelengths, synchronously with the object on the stage reaching respective predetermined positions while moving the stage.